Carl Zeiss, Zeiss LM 100 - Inspection and Measurement System


MICROSCOPES FOR THE MICROELECTRONICS INDUSTRY / FLAT PANEL INSPECTION SYSTEMS
Zeiss LM 100 - Inspection and Measurement System For Large Substrates *LM 100 - Automated Workstations* The Zeiss LM 100 microscope system combines all inspection and measurement tasks in one workstation. Featuring the superb optical quality of the Axiotron 2 and a wide range of contrasting methods, the LM 100 is specifically designed for the inspection and measurement of large substrates up to 550 x 550 mm in size. The system uses the powerful WIS 8000 application software to support optical inspection and review, as well as CD and overlay measurement. Additional applications which can be performed include film thickness measurement and color analysis. The WIS 8000 application software package offers a user friendly environment which allows the user to design positioning programs and control all automated system components. The LM 100 uses the optics from the Axiotron 2 which utilize the Zeiss Infinity Color corrected System (ICS) optics, producing a brilliant, high contrast, true color image. The operator views an upright and unreversed image using brightfield, darkfield, differential interference contrast, polarization or fluorescence techniques. The integration of electronics into the Axiotron 2 allows full automation of all the operating features. Together with an intelligent keypad, this gives the user full control of all functions without having to be concerned with details. When the user changes objectives or reflectors, the lamp intensity, aperture size and DIC adjustment change automatically to predefined values. The values are set to give the optimum image for that configuration. These taught settings are stored in the microscope and can be overridden with manual controls. As a result of this intelligent automation, training time for users is virtually eliminated. The LM 100 is designed to accept a substrate loader. Integrated pattern recognition offers fully automated measurement routines. The Multi-Channel Spectrometer (MCS) provides high speed film thickness measurement over a wide range of films (see Carl Zeiss Product Information T-8157 for more information). The Microscope System Controller gives access to all subsystems and connections and allows for remote locating. SECS-II and LAN interfacing are also supported.
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MICROSCOPES FOR THE MICROELECTRONICS INDUSTRY /
FLAT PANEL INSPECTION SYSTEMS

Zeiss LM 100 - Inspection and Measurement System For Large Substrates

LM 100 - Automated Workstations

LM 100 The Zeiss LM 100 microscope system combines all inspection and measurement tasks in one workstation. Featuring the superb optical quality of the Axiotron 2 and a wide range of contrasting methods, the LM 100 is specifically designed for the inspection and measurement of large substrates up to 550 x 550 mm in size.

The system uses the powerful WIS 8000 application software to support optical inspection and review, as well as CD and overlay measurement. Additional applications which can be performed include film thickness measurement and color analysis. The WIS 8000 application software package offers a user friendly environment which allows the user to design positioning programs and control all automated system components.

The LM 100 uses the optics from the Axiotron 2 which utilize the Zeiss Infinity Color corrected System (ICS) optics, producing a brilliant, high contrast, true color image. The operator views an upright and unreversed image using brightfield, darkfield, differential interference contrast, polarization or fluorescence techniques.

The integration of electronics into the Axiotron 2 allows full automation of all the operating features. Together with an intelligent keypad, this gives the user full control of all functions without having to be concerned with details.
When the user changes objectives or reflectors, the lamp intensity, aperture size and DIC adjustment change automatically to predefined values. The values are set to give the optimum image for that configuration. These taught settings are stored in the microscope and can be overridden with manual controls. As a result of this intelligent automation, training time for users is virtually eliminated.

The LM 100 is designed to accept a substrate loader. Integrated pattern recognition offers fully automated measurement routines. The Multi-Channel Spectrometer (MCS) provides high speed film thickness measurement over a wide range of films (see Carl Zeiss Product Information T-8157 for more information). The Microscope System Controller gives access to all subsystems and connections and allows for remote locating. SECS-II and LAN interfacing are also supported.

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If you have any suggestions and/or requests please contact [email protected].