Carl Zeiss introduces fully integrated software for its Axiowis Wafer Inspection System. The powerful and flexible WIS 8000 software package controls the Carl Zeiss Axiowis wafer inspection system which features a microscope equipped with an autofocus and high precision motor stage, the Microscope System Controller (MSC) and a state-of-the-art three axis wafer handling robot. The WIS 8000 software package now features a graphic user interface (GUI) and an innovative file format for easy editing of programs and data files.

With this new software package, users of the Carl Zeiss Axiowis system can perform the full range of semiconductor process control tasks. The WIS 8000 software integrates all measurement and inspection applications - such as film thickness, CD, overlay and Z height measurement and wafer review inspections. In addition, pattern recognition can be added for full automation as well as providing TV focusing and measurement capabilities.

The software's mouse-driven visual interface features easy-to-use graphics, which allows users to set program parameters quickly and effortlessly, and gives the operator complete control of all system functions. Menu selections can be customized to induvidual users and a function key trackball allows quick feature selections in addition to reducing footprint.

In addition to a powerful wafer map and file management system, the software implements SECS, RS-232, LAN network links and other custom interfaces. The WIS 8000 system can also be interfaced to other production defect systems to exchange data and provide review capability. Because program and data files are ASCII compatible, programs can be created and edited off-line and third-party analysis software can be integrated.

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