Carl Zeiss introduces the automated, non-contackt thick film measuring workstation Axiospeed FT Plus. This workstation measures absolute thickness of thick transparent films on wafers and other substrates.

Axiospeed FT Plus combines a Zeiss Diode Array Spectrometer, special measurement software and a Transputer parallel process unit for increased speed. The basis of the workstation is a microscope equipped with autofocus and high precision motor stage, the Microscope System Controller (MSC), a state-of-the-art three axis wafer handling robot and user-friendly software
( WIS 8000) with a graphic user interface.

This easy to use workstation allows automated, non-contact measurements, preventing wafer damage. Axiospeed FT Plus allows measurement from 0,1 to 140 µm optical thickness and can also evaluate dual films. Two techniques are used for evaluation, FFT (Fast Fourier Transform) for thick films and phase analysis for thin films. Pattern recognition can be added for full automation.

Axiospeed FT Plus can be operated automatically or manually. The workstation permits rapid measurements through fast transputer operation and terminal operation for on-line measurement and analysis. Measurement is easy as the workstation is tolerant of process variations for accurate, consistently reproducible results.

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